Our Force/StrengthsRemotely Generated Plasma: We have independent control of all process parameters including target voltage and ion current Low Temperature Process: Low temperature deposition for plastic or other 'delicate' substrates Stable High Rate Reactive Process: Virtual elimination of target poisoning since the surface of the target is uniformly eroded. Stress Control: Due to our unique process we are able to control the stress if growing thin films from compressive through to tensile. Potential for Multilayer Devices: PQL systems have the ability to deposit multilayer without breaking vacuum Thick ferromagnetic targets: Ability to sputter from thick ferromagnetic targets Substrate plasma-cleaning: Offering enhanced adhesion performance |
Strategic MaterialsMetals: Ag, Al, Au, Bi, Co, Cr, Cu, Fe, Hf, In, Mg, Mn, Mo, Nb, Ni, Pb, Pt, Sn, Ta, Ti, W, Y, Zn, Zr Dielectrics: AlN, Al2O3, PbO, SiO2, Ta2O5, NbO5, TiO2, TixO2x-1, TiN, HfO2, CuO, In2O3, MgO (Oxy-Nitrides and sub-oxides are also possible with PQL technology) Transparent conducting oxides: Sn:InO (ITO), In:ZnO(IZO), Al:ZnO (AZO), ZnO Magnetic materials: Co, CoFe, Fe, NiFe |