Alternative process from wet chemical coatings - plasma-quest.com
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Alternative process from wet chemical coatings |
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Coating by wet processes such as electroplating is becoming increasingly less acceptable. PQL’s sputter deposition technology offers an attractive alternative, with commercial benefits having already been demonstrated.
- Film densities are substantially higher than can be achieved through wet processing
- Adhesion is significantly greater
- The required thicknesses of the deposited films can be thinner.
- The number of process operations such as post deposition annealing is reduced, leading to higher yields.
As an example, chromium and gold films sputtered onto molybdenum discs out performed electroplated devices, and were significantly better than films deposited from conventional PVD systems.
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