Our Force/Strengths
Remotely Generated Plasma:
We have independent control of all process parameters including target voltage and ion current
Low Temperature Process:
Low temperature deposition for plastic or other 'delicate' substrates
Stable High Rate Reactive Process:
Virtual elimination of target poisoning since the surface of the target is uniformly eroded.
Stress Control:
Due to our unique process we are able to control the stress if growing thin films from compressive through to tensile.
Potential for Multilayer Devices:
PQL systems have the ability to deposit multilayer without breaking vacuum
Thick ferromagnetic targets:
Ability to sputter from thick ferromagnetic targets
Substrate plasma-cleaning:
Offering enhanced adhesion performance
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PQL's advanced plasma processes have proven especially suited to deposition onto plastic substrates, providing a wide range of new options to support the growing field of flexible electronics.
Advantages:
Deposition onto flexibles (low temperature process)
Negligible plasma damage to substrates
Controllable film stress
Excellent adhesion
High deposition rate: fast throughput, large area
Near ideal physical properties: close to bulk
We have demonstrated deposition of high quality, zero stress thin films of metals, dielectrics, ferromagnetic materials and transparent conducting oxides onto thin plastic sheet.
We are currently developing a prototype system for roll-to-roll coating of thin plastic sheet such as PET – this is expected to provide the basis for our first commercial web coating system.
PQL's advanced plasma processes have proven especially suited to deposition onto plastic substrates, providing a wide range of new options to support the growing field of flexible electronics.
Advantages:
- Deposition onto flexibles (low temperature process)
- Negligible plasma damage to substratesControllable film stress
- Excellent adhesion
- High deposition rate: fast throughput, large area
- Near ideal physical properties: close to bulk
We have demonstrated deposition of high quality, zero stress thin films of metals, dielectrics, ferromagnetic materials and transparent conducting oxides onto thin plastic sheet.
We are currently developing a prototype system for roll-to-roll coating of thin plastic sheet such as PET – this is expected to provide the basis for our first commercial web coating system.
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Strategic Materials
Metals:
Ag, Al, Au, Bi, Co, Cr, Cu, Fe, Hf, In, Mg, Mn, Mo, Nb, Ni, Pb, Pt, Sn, Ta, Ti, W, Y, Zn, Zr
Dielectrics:
AlN, Al2O3, PbO, SiO2, Ta2O5, NbO5, TiO2, TixO2x-1, TiN, HfO2, CuO, In2O3, MgO
(Oxy-Nitrides and sub-oxides are also possible with PQL technology)
Transparent conducting oxides:
Sn:InO (ITO), In:ZnO(IZO), Al:ZnO (AZO), ZnO
Magnetic materials:
Co, CoFe, Fe, NiFe
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