Our Force/StrengthsRemotely Generated Plasma: We have independent control of all process parameters including target voltage and ion current Low Temperature Process: Low temperature deposition for plastic or other 'delicate' substrates Stable High Rate Reactive Process: Virtual elimination of target poisoning since the surface of the target is uniformly eroded. Stress Control: Due to our unique process we are able to control the stress if growing thin films from compressive through to tensile. Potential for Multilayer Devices: PQL systems have the ability to deposit multilayer without breaking vacuum Thick ferromagnetic targets: Ability to sputter from thick ferromagnetic targets Substrate plasma-cleaning: Offering enhanced adhesion performance |
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