PQL’s sidearm technology can be purchased as a straightforward and cost effective upgrade to existing thin film deposition systems to reap the benefits of deploying PQL’s Hi Target Utilisation Sputtering (HiTUS) technology.

Contact PQL to learn how integrating HiTUS with your existing sputtering deposition system will improve processes such as metal and dielectric sputtering; reactive sputter coating; Plasma etch.

The HiTUS Plasma Launch System is available with 100mm and 150mm plasma launch tube.

Upgrades:

It should be recognised that HiTUS systems, whilst appearing simple in construction, have complex process technologies underpinning them. It is this process expertise that enables PQL to offer its Clients a significantly enhanced product than if the Client chooses to attempt a system build.
Notwithstanding this, PQL does supply the Plasma Launch System (PLS) which is the heart of the technology as a stand alone “component” for integration into a Client’s vacuum chamber.  In such instances PQL will work closely with the Client to maximise the opportunity to have a successful system build.
It should also be noted that the final COST of such a chosen route may well be higher than the purchase of a full upgrade as designed and supplied by PQL.

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